Thin Film Transistor

This lecture deals with a key element such as thin film transistor (TFT) for thin film electronics, being the most important device on flat panel display applications as well as 3D stackable semiconductor devices. In this course, we shall start with fundamentals and a concise historical perspective. Then, we will learn about structure, fabrication and transistor characterization. Additionally, taking into account that the semiconductor for TFT is made of thin film process, we shall explore TFTs with various thin film semiconductors (amorphous Si, poly-Si, and electronically active oxide semiconductor.