Academics

Graduate Program

CMOS Front-end Process Technology

Subject No.
Research
Credit
Classification
Prerequisite

This module covers essential process steps in CMOS IC fabrication, focusing on front-end process technology including gate module, shallow junction module, thin film deposition, interconnection, and patterning technology. The students also develop understanding of physical background of each unit process as well as integration issues in modern CMOS devices. Recent developments in front-end processing are also covered.
(Prerequisite: EE211, EE362)

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