This module covers essential process steps in CMOS IC fabrication, focusing on front-end process technology including gate module, shallow junction module, thin film deposition, interconnection, and patterning technology. The students also develop understanding of physical background of each unit process as well as integration issues in modern CMOS devices. Recent developments in front-end processing are also covered.
(Prerequisite: EE211, EE362)
It covers interfacial phenomena occurring in a hybrid system of semiconductors and biomolecules, elementary biological materials, fundamentals of MOSFET, nanofabrication techniques, manipulation technology of bio-molecules based on nanobiotechnology, aqueous solutions, solid-liquid junctions, Lab-on-a-Chip, biosensors, and Bio-MEMS technology.
In this course, the technology trend of the next generation information display devices will be introduced and their basic principles will be studied. In particular, LCD, PDP, OLED, and FED are mainly discussed.
This course primarily emphasizes “quantum mechanics” and “statistical physics” for engineers. Quantum mechanics includes a history of quantum physics, Schrödinger equation, a concept of a wavepacket, and N-degrees of freedom. Statistical physics covers a motivation, concept of ensemble average, Boltzmann distribution, Bose-Einstein distribution, Fermi-Dirac distribution, and Non-Equilibrium statistics.
In this course, we will discover microelectromechanical systems (MEMS) in electrical engineering perspective, touching a complete set of design, fabrication, and applications. With respect to designing MEMS, we will explore various working principles, CAD tools including semiconductor design tools, and signal processing circuits. Also, core semiconductor processing technologies and a wide range of micro-machining techniques are studied in depth, in order to fabricate MEMS. We will address important issues in major fields of MEMS applications, including microsensors, RF/microwave, optical, and bio / microfluidic MEMS, especially in an electrical engineering viewpoint.
In this course, various photovoltaic devices and systems are introduced. This course deals with the basic theory of solar cells, the structures and characteristics of various solar cells, and the recent R&D trend and future prospects of photovoltaic technologies. (Prerequisites: EE211)