Quantum Engineering for Nanoelectronic Devices

The course will cover basic physics and applications of various solid-state materials such as metals, semiconductors, dielectrics, thermoelectric materials, and magnetic materials. Also are included the various physics of nanostructures such as quantum well, quantum wire, quantum dots.

This module covers essential process steps in CMOS IC fabrication, focusing on front-end process technology including gate module, shallow junction module, thin film deposition, interconnection, and patterning technology. The students also develop understanding of physical background of each unit process as well as integration issues in modern CMOS devices. Recent developments in front-end processing are also covered.
(Prerequisite: EE211, EE362)